Laser drilling of micro-holes in single crystal silicon, indium phosphide and indium antimonide using a continuous wave (CW) 1070 nm fibre laser with millisecond pulse widths
Maclean, Jessica O., Tangkijcharoenchai, C., Coomber, Stuart, Voisey, Katy T.Volume:
74
Year:
2018
Language:
english
Journal:
Procedia CIRP
DOI:
10.1016/j.procir.2018.08.158
File:
PDF, 744 KB
english, 2018