Modeling of the PVT Growth Process of Bulk 3C-SiC - Growth...

Materials Science Forum 2019 / 7 Vol. 963

Modeling of the PVT Growth Process of Bulk 3C-SiC - Growth Process Development and Challenge of the Right Materials Data Base

Schöler, Michael, Schuh, Philipp, Steiner, Johannes, Wellmann, Peter J.
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Volume:
963
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.963.157
Date:
July, 2019
File:
PDF, 2.08 MB
english, 2019
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