Crystalline Inclusions Formed in C+N+BF2Coimplanted on...

Microchimica Acta 2004 / 04 Vol. 145; Iss. 1-4

Crystalline Inclusions Formed in C+N+BF2Coimplanted on Silicon (111)

Arturo Ponce, Francisco M. Morales, Sergio I. Molina, Lucía Barbadillo, Manuel Cervera, Marí J. Hernández, Pedro Rodríguez, Juan Piqueras
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Volume:
145
Language:
english
Pages:
5
DOI:
10.1007/s00604-003-0147-5
Date:
April, 2004
File:
PDF, 200 KB
english, 2004
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