Off-Line Metrology on SEM Images Using Gray Scale...

Microchimica Acta 2006 / 09 Vol. 155; Iss. 1-2

Off-Line Metrology on SEM Images Using Gray Scale Morphology

Elias N. Zois, Ioannis Raptis, Vassilis Anastassopoulos
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Volume:
155
Language:
english
Pages:
4
DOI:
10.1007/s00604-006-0564-3
Date:
September, 2006
File:
PDF, 199 KB
english, 2006
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