Design, Modeling, and Testing of a Novel XY Piezo-Actuated...

Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage

Zhang, Quan, Zhao, Jianguo, Shen, Xin, Xiao, Qing, Huang, Jun, Wang, Yuan
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Volume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10090581
Date:
August, 2019
File:
PDF, 7.45 MB
english, 2019
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