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DESIGN AND NANOMETER POSITIONING OF A LOW FRICTION PNEUMATIC CYLINDER EMBEDDED WITH AEROSTATIC BEARINGS
Shih, Ming-Chang, Pai, Kei-RenVolume:
2008
Year:
2008
Language:
english
Journal:
Proceedings of the JFPS International Symposium on Fluid Power
DOI:
10.5739/isfp.2008.231
File:
PDF, 1.41 MB
english, 2008