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Etching behaviors of tunneling magnetoresistive (TMR) materials by ion beam etching system
Wongpanit, N., O. Å. Persson, P., Tungasmita, S.Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.04.080
File:
PDF, 1.24 MB
english, 2018