SIMS Profiling and TEM of CVD Films on Multi-Filament Samples
Dagmar Dietrich, Peter Willich, Sabine Stöckel, Kathrin Weise, Günter MarxVolume:
133
Language:
english
Pages:
4
DOI:
10.1007/s006040070090
Date:
June, 2000
File:
PDF, 263 KB
english, 2000