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A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
Shi, Yue, He, Liang, Guang, Fangcao, Li, Luhai, Xin, Zhiqing, Liu, RupingVolume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10080552
Date:
August, 2019
File:
PDF, 9.31 MB
english, 2019