Photoelectric and magnetic properties of Fe-hyperdoped Si...

Materials Science in Semiconductor Processing 2020 / 01 Vol. 105

Photoelectric and magnetic properties of Fe-hyperdoped Si layers formed by the recoil-atom implantation

Batalov, Rafael, Bayazitov, Rustem, Faizrakhmanov, Ildar, Khaibullin, Rustam, Tagirov, Lenar, Gumarov, Amir, Vdovin, Vladimir
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Volume:
105
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104752
Date:
January, 2020
File:
PDF, 1.79 MB
english, 2020
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