Performance analysis of embossed diaphragm based MEMS piezo...

Materials Today: Proceedings 2018 Vol. 5; Iss. 10

Performance analysis of embossed diaphragm based MEMS piezo resistive pressure sensor for flood level measurement

Sindhanaiselvi, D., Shanmuganantham, T.
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Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.06.541
File:
PDF, 921 KB
english, 2018
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