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[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - BSIM-CMG Modeling for 3D NAND Cell with Macaroni Channel
Kim, Minsoo, Myeong, Ilho, Kim, Juhyun, Kang, Myounggon, Jeon, Jongwook, Shin, HyungcheolYear:
2019
DOI:
10.1109/EDTM.2019.8731038
File:
PDF, 159 KB
2019