[IEEE 2018 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC) - Sydney, Australia (2018.11.10-2018.11.17)] 2018 IEEE Nuclear Science Symposium and Medical Imaging Conference Proceedings (NSS/MIC) - Single Photon Avalanche Diodes and Vertical Integration Process for a 3D Digital SiPM using Industrial Semiconductor Technologies

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