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[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Modeling of Channel Current in Sub-threshold Region for Poly-Si based Macaroni Structure in 3D NAND Flash Memories
Kim, Juhyun, Myeong, Ilho, Kim, Minsoo, Kim, Sungbak, Kang, Myounggon, Jeon, Jongwook, Shin, HyungcheolYear:
2019
DOI:
10.1109/edtm.2019.8731334
File:
PDF, 162 KB
2019