New Method of Monte Carlo Calculation Using the Distorted Scattering Angle Distribution Depending on the Surface Roughness
YOSHIDA, Hajime, SHIRO, Masanori, HIRATA, Masahiro, AKIMICHI, HitoshiVolume:
54
Year:
2011
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.54.298
File:
PDF, 1.30 MB
2011