A 3-Degree-of-Freedom MEMS Mirror with Controllable Static...

A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering

Afsharipour, Elnaz, Park, Byoungyoul, Soltanzadeh, Ramin, Shafai, Cyrus
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Volume:
2
Journal:
Proceedings
DOI:
10.3390/proceedings2130938
Date:
December, 2018
File:
PDF, 531 KB
2018
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