Dependence of electrical properties on sulfur distribution...

Applied Surface Science 2019 / 10 Vol. 491

Dependence of electrical properties on sulfur distribution in atomic-layer-deposited HfO2 thin film on an InP substrate

Jin, Hyun Soo, Seok, Tae Jun, Cho, Deok-Yong, Park, Tae Joo
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Volume:
491
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.06.100
Date:
October, 2019
File:
PDF, 955 KB
2019
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