A nondestructive raman spectra stress 2D analysis for the...

Engineering Failure Analysis 2019 / 11 Vol. 105

A nondestructive raman spectra stress 2D analysis for the pressure sensor sensitive silicon membrane

Wang, Zhenyu, Si, Bingjian, Chen, Su, Jiao, Binbin, Yan, Xiulan
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Volume:
105
Journal:
Engineering Failure Analysis
DOI:
10.1016/j.engfailanal.2019.06.089
Date:
November, 2019
File:
PDF, 2.71 MB
2019
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