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Epoxy Resins for Negative Tone Photoresists
Vlnieska, Vitor, Mikhaylov, Andrey, Zakharova, Margarita, Blasco, Eva, Kunka, DanaysVolume:
11
Journal:
Polymers
DOI:
10.3390/polym11091457
Date:
September, 2019
File:
PDF, 11.14 MB
2019