Error Analysis and Compensation of a Laser Measurement...

Sensors 2019 / 09 Vol. 19; Iss. 18

Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages

Cai, Yindi, Sang, Qi, Lou, Zhi-Feng, Fan, Kuang-Chao
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Volume:
19
Journal:
Sensors
DOI:
10.3390/s19183833
Date:
September, 2019
File:
PDF, 3.52 MB
2019
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