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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Metal-Assisted Chemical Etching Method Subjected to Micro/Nano Device Fabrication
Toan, Nguyen Van, Wang, Xiaoyue, Inomata, Naoki, Toda, Masaya, Voiculescu, Ioana, Ono, TakahitoYear:
2019
DOI:
10.1109/transducers.2019.8808663
File:
PDF, 8.85 MB
2019