Novel volatile film for the protection of organo-silicate...

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IEEE Transactions on Semiconductor Manufacturing 2019

Novel volatile film for the protection of organo-silicate glass dielectric materials

Fujikawa, M., Yamaguchi, T., Nozawa, S., Kikuchi, Y., Maekawa, K., Kawasaki, H., Chanson, R., de Marneffe, J.-F.
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Year:
2019
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2019.2941323
File:
PDF, 1.14 MB
english, 2019
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