High-Concentration, Low-Temperature, and Low-Cost Excimer...

Materials Science Forum 2019 / 7 Vol. 963

High-Concentration, Low-Temperature, and Low-Cost Excimer Laser Doping for 4H-SiC Power Device Fabrication

Imokawa, Kaname, Kikuchi, Toshifumi, Okamoto, Kento, Nakamura, Daisuke, Ikeda, Akihiro, Asano, Tanemasa, Ikenoue, Hiroshi
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Volume:
963
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.963.403
Date:
July, 2019
File:
PDF, 1.01 MB
english, 2019
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