High-quality Ge and Sn Thin Films Deposited on Si Substrate by Magnetron Sputtering
Qian, Li, Ni, Peinan, Xu, Zhengji, Tong, Jinchao, Fan, Weijun, Zhang, Dao HuaVolume:
215
Year:
2017
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2017.11.154
File:
PDF, 1.14 MB
english, 2017