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An in-plane, large-stroke, multipole electromagnetic microactuator realized by guideways stacking mechanism
Han, Dong, Shinshi, Tadahiko, Azuma, Noriei, Kadota, ShogoVolume:
298
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.111563
Date:
October, 2019
File:
PDF, 5.32 MB
english, 2019