Effects of process parameters on optical characteristics of...

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Thin Solid Films 2019 / 9

Effects of process parameters on optical characteristics of diamond-like carbon thin films deposited using high-power impulse magnetron sputtering

Tang, Jian-Fu, Tsai, Yi-Jing, Huang, Chun-Hong, Lin, Ching-Yen, Yang, Fu-Chi, Hwang, Jenn-Jiang, Chang, Chi-Lung
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.137562
Date:
September, 2019
File:
PDF, 6.67 MB
english, 2019
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