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Structural, optical, and interface properties of sputtered AlN thin films under different hydrogen dilution conditions
Montañez, L, Töfflinger, J.A., Grieseler, R., Fischer, P., Ben-Or, A., Guerra, J.A., Weingärtner, R., Osten, H.J., Kribus, A.Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.03.066
File:
PDF, 765 KB
english, 2018