Development and analysis of tantalum nitride coatings...

Materials Today: Proceedings 2018 Vol. 5; Iss. 10

Development and analysis of tantalum nitride coatings prepared by DC reactive sputtering

Kapopara, Jaydeep M., Chauhan, Kamlesh V., Jariwala, Nayan N., Gandhi, Akash A., Rawal, Sushant K.
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Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.06.477
File:
PDF, 255 KB
english, 2018
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