The Endocyclic Carbon Substituent of Guanidinate and...

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The Journal of Physical Chemistry C 2019 / 09

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Rouf, Polla, O'Brien, Nathan J., Ronnby, Karl, Samii, Rouzbeh, Ivanov, Ivan G., Ojamäe, Lars, Pedersen, Henrik
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Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.9b07005
Date:
September, 2019
File:
PDF, 17.73 MB
english, 2019
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