Reduction of defects in the lapping process of the silicon...

Reduction of defects in the lapping process of the silicon wafer manufacturing: the Six Sigma application

Sharma, Mithun, Sahni, Sanjeev P., Sharma, Shilpi
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Volume:
11
Language:
english
Journal:
Engineering Management in Production and Services
DOI:
10.2478/emj-2019-0013
Date:
July, 2019
File:
PDF, 1.13 MB
english, 2019
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