Design and Simulation of MEMS Gas Sensor Topologies for Detection of Inert Gases
Umesh, Suma, Balachandra, T.C., Usha, A.Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.06.540
File:
PDF, 1.05 MB
english, 2018