Characterization of Sublimation Based Microstructure Release Technique to Combat Stiction Effect
Sawant, Durvesh, Bhole, Kiran, Buktar, RajeshVolume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.10.199
File:
PDF, 1.06 MB
english, 2018