Sputtering of a hot ceramic target: Experiments with ZnO

Vacuum 2019 / 10 Vol. 168

Sputtering of a hot ceramic target: Experiments with ZnO

Ismailov, Abubakar M., Nikitenko, Vladimir A., Rabadanov, Murtuzali R., Emiraslanova, Leyla L., Aliev, Isa Sh., Rabadanov, Murtazali Kh.
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Volume:
168
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.108854
Date:
October, 2019
File:
PDF, 1.30 MB
english, 2019
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