Bias voltage effect on magnetron sputtered titanium aluminum nitride TiAlN thin films properties
Ait-Djafer, Zouina Amina, Saoula, Nadia, Wamwangi, Daniel, Madaoui, Noureddine, Aknouche, HamidVolume:
86
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2019180344
Date:
June, 2019
File:
PDF, 1.07 MB
english, 2019