Design, Simulation and Analysis of MEMS based Piezoresistive Cantilever sensor
Veena, N., Balachandra, T.C., Umesh, SumaVolume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2017.12.351
File:
PDF, 945 KB
english, 2018