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DC reactive sputter deposition of CuO thin films at different operating pressures
Sangwaranatee, N.W., Sangwaranatee, N., Horprathum, M., Chananonnawathorn, C., Muntini, M.Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.04.076
File:
PDF, 1.17 MB
english, 2018