Fabrication of hollow microtip electrode array with variable diameter using self-aligned etching process
Nam, Kyeong-Taek, Lee, Seung-Ki, Park, Jae-HyoungVolume:
216
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111100
Date:
August, 2019
File:
PDF, 1.94 MB
english, 2019