Surface roughness of aluminum oxide thin films deposited by...

Materials Today: Proceedings 2018 Vol. 5; Iss. 7

Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering

Hom-on, Chatpawee, Horprathum, Mati, Eiamchai, Pitak, Limwichean, Sakson, Patthanasettakul, Viyapol, Nuntawong, Noppadon, Chananonnawathorn, Chanunthorn, Lertvanithphol, Tossaporn, Triroj, Napat, Jaro
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Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.04.088
File:
PDF, 948 KB
english, 2018
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