![](/img/cover-not-exists.png)
Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering
Hom-on, Chatpawee, Horprathum, Mati, Eiamchai, Pitak, Limwichean, Sakson, Patthanasettakul, Viyapol, Nuntawong, Noppadon, Chananonnawathorn, Chanunthorn, Lertvanithphol, Tossaporn, Triroj, Napat, JaroVolume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.04.088
File:
PDF, 948 KB
english, 2018