Influence of Polysilicon Deposition Conditions on Advanced...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 10

Influence of Polysilicon Deposition Conditions on Advanced 3D NAND

Zhang, Guodong, Wang, Bingguo, Li, Tuo, Li, Lei, Liu, Junzhan, Luo, Jun
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Volume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0171910jss
File:
PDF, 519 KB
english, 2019
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