Discrete Metal Deposition on Hydrogen Terminated Silicon...

Discrete Metal Deposition on Hydrogen Terminated Silicon Surfaces: Kinetics, Morphologies and Sensor Applications

Chyan, Oliver, Chen, Jin-Jian, Wu, Junjun, Chien, Steve, Liu, Min
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Volume:
451
Year:
1996
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-451-267
File:
PDF, 501 KB
english, 1996
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