Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
Wack, Sabrina, Lunca Popa, Petru, Adjeroud, Noureddine, Guillot, Jérôme, Pistillo, Bianca Rita, Leturcq, RenaudLanguage:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.9b06473
Date:
October, 2019
File:
PDF, 1.02 MB
english, 2019