An Infinite Stiffness Aerostatic Bearing with an Exhaust Control Restrictor.
MIZUMOTO, Hiroshi, TANAKA, Hisataka, OKUNO, Katsunori, MATSUBARA, Tomio, KAWAKAMI, RyuichiVolume:
57
Year:
1991
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.57.2054
File:
PDF, 1.25 MB
1991