Oblique angle deposition of nickel thin films by high-power...

Beilstein Journal of Nanotechnology 2019 / 09 Vol. 10

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering

Hajihoseini, Hamidreza, Kateb, Movaffaq, Ingvarsson, Snorri Þorgeir, Gudmundsson, Jon Tomas
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Volume:
10
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.10.186
Date:
September, 2019
File:
PDF, 2.96 MB
english, 2019
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