Effect of thickness scaling on the permeability and thermal...

Applied Surface Science 2019 / 12 Vol. 498

Effect of thickness scaling on the permeability and thermal stability of Ta(N) diffusion barrier

Xu, Haoyu, Hu, Zheng-Jun, Qu, Xin-Ping, Wan, Hao, Yan, Shen-Suo, Li, Ming, Chen, Shou-Mian, Zhao, Yu-Hang, Zhang, Jing, Baklanov, Mikhail R.
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Volume:
498
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.143887
Date:
December, 2019
File:
PDF, 4.39 MB
english, 2019
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