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Point and extended defect interaction in low – high energy phosphorus implantation sequences
Mica, I., Polignano, M.L., Bacciaglia, P., Brazzelli, D., Cseh, D., Galbiati, A., Grasso, S., Juhel, M., Kiss, Z.T., Monge Roffarello, P., Tomezzoli, E., Torti, A.M.Volume:
5
Year:
2018
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.03.068
File:
PDF, 2.59 MB
2018