Data-driven rational feedforward tuning: With application...

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Proceedings of the Institution of Mechanical Engineers Part I: Journal of Systems and Control Engineering 2019 / 09

Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage

Huang, Weicai, Yang, Kaiming, Zhu, Yu, Li, Xin, Mu, Haihua, Li, Min
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Journal:
Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering
DOI:
10.1177/0959651819874563
Date:
September, 2019
File:
PDF, 1.46 MB
2019
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