Effect of Sputtering Temperature on Fluorocarbon Films:...

Nanomaterials 2019 / 06 Vol. 9; Iss. 6

Effect of Sputtering Temperature on Fluorocarbon Films: Surface Nanostructure and Fluorine/Carbon Ratio

Zhao, Qi, Wang, Feipeng, Wang, Kaizheng, Xie, Guibai, Cui, Wanzhao, Li, Jian
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Volume:
9
Journal:
Nanomaterials
DOI:
10.3390/nano9060848
Date:
June, 2019
File:
PDF, 2.80 MB
2019
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