Kinetic mechanism of conformal magnesium silicide (Mg2Si)...

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Kinetic mechanism of conformal magnesium silicide (Mg2Si) film formation via reaction of Si single crystals with Mg vapor

Li, Jiaqi, Hwang, SungHwan, Itskos, Grigorios, Sandhage, Kenneth H.
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Language:
english
Journal:
Journal of Materials Science
DOI:
10.1007/s10853-019-04083-6
Date:
October, 2019
File:
PDF, 1.61 MB
english, 2019
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