[IEEE 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Polyana, Ukraine (2019.5.22-2019.5.26)] 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Simulation, Making and Testing of the Actuator of Precise Positioning Based on the Bimorph Plate of Lithium Niobate

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