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Spectroscopic study of an atmospheric pressure plasma generated for the deposition of titanium dioxide thin films
Mauchauffé, Rodolphe, Kang, Seongchan, Kim, Jongwoon, Kim, Jong-Hoon, Moon, Se YounVolume:
19
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2019.08.008
Date:
November, 2019
File:
PDF, 2.66 MB
english, 2019